Analytical Design of Micro Electro Mechanical Systems (MEMS) based Piezoelectric Accelerometer for high g acceleration
نویسندگان
چکیده
AbstractThis paper describes the analytical analysis of MEMS based accelerometer consisting of proof mass suspended by quasi beams. The mathematical equations have been used to find the geometrical specification to design an accelerometer. The purpose of the work is to optimize the design for high g value of acceleration. An attempt has been made to design a bulk micromachined accelerometer that satisfies certain specifications. The geometry of the accelerometer is to be optimized for 20g acceleration.
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تاریخ انتشار 2014